Tool Refurbish and Service
Professional semiconductor tool refurbishment, repair services, and new tool manufacturing
Used tool Refurbish and Service
LAM(SEZ)201/203/223/323/4200/4300/304
LAM(SEZ) DV34/DV38/DVP TOOLS
Repair and Overhaul Service
SEZ DV direct drive spindle overhaul
SEZ Parts repair or overhaul
Labor Service for SEZ tool
New Tool Design and Make
Thin Wafer Tool: UST S32
Standard Wafer Tool: ES34, ES38 ...
Service Case Studies
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Used tool Refurbish and Service
LAM(SEZ) 201/203/223/323/4200/4300/304 & DV34/DV38/DVP TOOLS Refurbish
Used tool Refurbish and Service

Repair and Overhaul Service
Direct Drive Spindle Overhaul Process 1, Dismantled all parts of the spindle
Repair and Overhaul Service

Repair and Overhaul Service
Direct Drive Spindle Overhaul Process 2, Dismantled all parts of the spindle
Repair and Overhaul Service

Repair and Overhaul Service
Direct Drive Spindle Overhaul Process 3, Dismantled all parts of the spindle
Repair and Overhaul Service

Repair and Overhaul Service
CHUCK Overhaul Service - SP323/DV34/DV38/DVP Types
Repair and Overhaul Service

Repair and Overhaul Service
CHUCK Overhaul Service - SP323/DV34/DV38/DVP Types
Repair and Overhaul Service

Repair and Overhaul Service
CHUCK Overhaul Service - SP323/DV34/DV38/DVP Types
Repair and Overhaul Service

New Tool Design and Make
ES38 - small footprint, reduce clean room space and air conditioning cost, no major modification
New Tool Design and Make

New Tool Design and Make
ES34 - small footprint, reduce clean room space and air conditioning cost, no major modification
New Tool Design and Make

New Tool Design and Make
Bernoulli ECO Grip - Advanced Wafer Handling Solution
New Tool Design and Make

New Tool Design and Make
Bernoulli Robot End Effector - Precision Wafer Transport
New Tool Design and Make

New Tool Design and Make
Supports Dispenser Arm and Flexible Process Design
New Tool Design and Make