Tool Refurbish and Service

Professional semiconductor tool refurbishment, repair services, and new tool manufacturing

Used tool Refurbish and Service

LAM(SEZ)201/203/223/323/4200/4300/304
LAM(SEZ) DV34/DV38/DVP TOOLS

Repair and Overhaul Service

SEZ DV direct drive spindle overhaul
SEZ Parts repair or overhaul
Labor Service for SEZ tool

New Tool Design and Make

Thin Wafer Tool: UST S32
Standard Wafer Tool: ES34, ES38 ...

Service Case Studies

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LAM(SEZ) 201/203/223/323/4200/4300/304 & DV34/DV38/DVP TOOLS Refurbish
Used tool Refurbish and Service

LAM(SEZ) 201/203/223/323/4200/4300/304 & DV34/DV38/DVP TOOLS Refurbish

Used tool Refurbish and Service

Direct Drive Spindle Overhaul Process 1, Dismantled all parts of the spindle
Repair and Overhaul Service

Direct Drive Spindle Overhaul Process 1, Dismantled all parts of the spindle

Repair and Overhaul Service

Direct Drive Spindle Overhaul Process 2, Dismantled all parts of the spindle
Repair and Overhaul Service

Direct Drive Spindle Overhaul Process 2, Dismantled all parts of the spindle

Repair and Overhaul Service

Direct Drive Spindle Overhaul Process 3, Dismantled all parts of the spindle
Repair and Overhaul Service

Direct Drive Spindle Overhaul Process 3, Dismantled all parts of the spindle

Repair and Overhaul Service

CHUCK Overhaul Service - SP323/DV34/DV38/DVP Types
Repair and Overhaul Service

CHUCK Overhaul Service - SP323/DV34/DV38/DVP Types

Repair and Overhaul Service

CHUCK Overhaul Service - SP323/DV34/DV38/DVP Types
Repair and Overhaul Service

CHUCK Overhaul Service - SP323/DV34/DV38/DVP Types

Repair and Overhaul Service

CHUCK Overhaul Service - SP323/DV34/DV38/DVP Types
Repair and Overhaul Service

CHUCK Overhaul Service - SP323/DV34/DV38/DVP Types

Repair and Overhaul Service

ES38 - small footprint, reduce clean room space and air conditioning cost, no major modification
New Tool Design and Make

ES38 - small footprint, reduce clean room space and air conditioning cost, no major modification

New Tool Design and Make

ES34 - small footprint, reduce clean room space and air conditioning cost, no major modification
New Tool Design and Make

ES34 - small footprint, reduce clean room space and air conditioning cost, no major modification

New Tool Design and Make

Bernoulli ECO Grip - Advanced Wafer Handling Solution
New Tool Design and Make

Bernoulli ECO Grip - Advanced Wafer Handling Solution

New Tool Design and Make

Bernoulli Robot End Effector - Precision Wafer Transport
New Tool Design and Make

Bernoulli Robot End Effector - Precision Wafer Transport

New Tool Design and Make

Supports Dispenser Arm and Flexible Process Design
New Tool Design and Make

Supports Dispenser Arm and Flexible Process Design

New Tool Design and Make

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Professional Semiconductor Equipment Services Provider - LAM & SEZ Equipment Specialists