Used tool Refurbish and Service
- LAM(SEZ)201/203/223/323/4200/4300/304
- LAM(SEZ) DV34/DV38/DVP TOOLS
Tool Refurbish and Service
Professional semiconductor tool refurbishment, repair services, and new tool manufacturing
Service Case Studies
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Used tool Refurbish and Service
LAM(SEZ) 201/203/223/323/4200/4300/304 & DV34/DV38/DVP TOOLS Refurbish
Used tool Refurbish and Service
Repair and Overhaul Service
Direct Drive Spindle Overhaul Process 1, Dismantled all parts of the spindle
Repair and Overhaul Service
Repair and Overhaul Service
Direct Drive Spindle Overhaul Process 2, Dismantled all parts of the spindle
Repair and Overhaul Service
Repair and Overhaul Service
Direct Drive Spindle Overhaul Process 3, Dismantled all parts of the spindle
Repair and Overhaul Service
Repair and Overhaul Service
CHUCK Overhaul Service - SP323/DV34/DV38/DVP Types
Repair and Overhaul Service
Repair and Overhaul Service
CHUCK Overhaul Service - SP323/DV34/DV38/DVP Types
Repair and Overhaul Service
Repair and Overhaul Service
CHUCK Overhaul Service - SP323/DV34/DV38/DVP Types
Repair and Overhaul Service
New Tool Design and Make
ES38 - small footprint, reduce clean room space and air conditioning cost, no major modification
New Tool Design and Make
New Tool Design and Make
ES34 - small footprint, reduce clean room space and air conditioning cost, no major modification
New Tool Design and Make
New Tool Design and Make
Bernoulli ECO Grip - Advanced Wafer Handling Solution
New Tool Design and Make
New Tool Design and Make
Bernoulli Robot End Effector - Precision Wafer Transport
New Tool Design and Make
New Tool Design and Make
Supports Dispenser Arm and Flexible Process Design
New Tool Design and Make
Service Portfolio
Tool Refurbish and Service
Professional semiconductor tool refurbishment, repair services, and new tool manufacturing
Capabilities
Service Categories
Repair and Overhaul Service
- SEZ DV direct drive spindle overhaul
- SEZ Parts repair or overhaul
- Labor Service for SEZ tool
New Tool Design and Make
- Thin Wafer Tool: UST S32
- Standard Wafer Tool: ES34, ES38 ...
Case Studies
Service Case Studies
Used tool Refurbish and Service
LAM(SEZ) 201/203/223/323/4200/4300/304 & DV34/DV38/DVP TOOLS Refurbish
Repair and Overhaul Service
Direct Drive Spindle Overhaul Process 1, Dismantled all parts of the spindle
Repair and Overhaul Service
Direct Drive Spindle Overhaul Process 2, Dismantled all parts of the spindle
Repair and Overhaul Service
Direct Drive Spindle Overhaul Process 3, Dismantled all parts of the spindle
Repair and Overhaul Service
CHUCK Overhaul Service - SP323/DV34/DV38/DVP Types
Repair and Overhaul Service
CHUCK Overhaul Service - SP323/DV34/DV38/DVP Types
Repair and Overhaul Service
CHUCK Overhaul Service - SP323/DV34/DV38/DVP Types
New Tool Design and Make
ES38 - small footprint, reduce clean room space and air conditioning cost, no major modification
New Tool Design and Make
ES34 - small footprint, reduce clean room space and air conditioning cost, no major modification
New Tool Design and Make
Bernoulli ECO Grip - Advanced Wafer Handling Solution
New Tool Design and Make
Bernoulli Robot End Effector - Precision Wafer Transport
New Tool Design and Make