二手设备翻新与服务
- LAM(SEZ)201/203/223/323/4200/4300/304
- LAM(SEZ) DV34/DV38/DVP 设备
设备翻新与服务
专业半导体设备翻新、维修服务及新设备制造
服务案例研究
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Used tool Refurbish and Service
LAM(SEZ) 201/203/223/323/4200/4300/304 & DV34/DV38/DVP TOOLS Refurbish
Used tool Refurbish and Service
Repair and Overhaul Service
Direct Drive Spindle Overhaul Process 1, Dismantled all parts of the spindle
Repair and Overhaul Service
Repair and Overhaul Service
Direct Drive Spindle Overhaul Process 2, Dismantled all parts of the spindle
Repair and Overhaul Service
Repair and Overhaul Service
Direct Drive Spindle Overhaul Process 3, Dismantled all parts of the spindle
Repair and Overhaul Service
Repair and Overhaul Service
CHUCK Overhaul Service - SP323/DV34/DV38/DVP Types
Repair and Overhaul Service
Repair and Overhaul Service
CHUCK Overhaul Service - SP323/DV34/DV38/DVP Types
Repair and Overhaul Service
Repair and Overhaul Service
CHUCK Overhaul Service - SP323/DV34/DV38/DVP Types
Repair and Overhaul Service
New Tool Design and Make
ES38 - small footprint, reduce clean room space and air conditioning cost, no major modification
New Tool Design and Make
New Tool Design and Make
ES34 - small footprint, reduce clean room space and air conditioning cost, no major modification
New Tool Design and Make
New Tool Design and Make
Bernoulli ECO Grip - Advanced Wafer Handling Solution
New Tool Design and Make
New Tool Design and Make
Bernoulli Robot End Effector - Precision Wafer Transport
New Tool Design and Make
New Tool Design and Make
Supports Dispenser Arm and Flexible Process Design
New Tool Design and Make
Service Portfolio
设备翻新与服务
专业半导体设备翻新、维修服务及新设备制造
Capabilities
Service Categories
维修与大修服务
- SEZ DV 直驱主轴大修
- SEZ 零件维修或大修
- SEZ 设备劳务服务
新设备设计与制造
- 薄晶圆设备：UST S32
- 标准晶圆设备：ES34、ES38...
Case Studies
服务案例研究
Used tool Refurbish and Service
LAM(SEZ) 201/203/223/323/4200/4300/304 & DV34/DV38/DVP TOOLS Refurbish
Repair and Overhaul Service
Direct Drive Spindle Overhaul Process 1, Dismantled all parts of the spindle
Repair and Overhaul Service
Direct Drive Spindle Overhaul Process 2, Dismantled all parts of the spindle
Repair and Overhaul Service
Direct Drive Spindle Overhaul Process 3, Dismantled all parts of the spindle
Repair and Overhaul Service
CHUCK Overhaul Service - SP323/DV34/DV38/DVP Types
Repair and Overhaul Service
CHUCK Overhaul Service - SP323/DV34/DV38/DVP Types
Repair and Overhaul Service
CHUCK Overhaul Service - SP323/DV34/DV38/DVP Types
New Tool Design and Make
ES38 - small footprint, reduce clean room space and air conditioning cost, no major modification
New Tool Design and Make
ES34 - small footprint, reduce clean room space and air conditioning cost, no major modification
New Tool Design and Make
Bernoulli ECO Grip - Advanced Wafer Handling Solution
New Tool Design and Make
Bernoulli Robot End Effector - Precision Wafer Transport
New Tool Design and Make